c.DEPO X LPCVD系統

c.DEPO X LPCVD-Anlage
PV Magazine's "Technology Highlights 2018"

水平管式LPCVD系統,用于本征或原位摻雜的多晶硅薄膜量產

c.DEPO X 平臺設計采用LPCVD技術,在p型及n型硅片上實現n+和p+摻雜的鈍化接觸。

基于centrotherm在半導體行業的工藝技術沉淀,加之最先進的高產能管式系統,新型LPCVD系統打開了量產更高效太陽電池的大門。

得益于其工藝的廣泛適用性和靈活性,c.DEPO X可以實現優異且穩定的工藝性能和鈍化質量。

工藝流程

  • LPCVD

ISFH POLO solar cell

POLO solar cell

The Institute for Solar Energy Research in Hamelin (ISFH), developed a POLO solar cell which holds the current world record on a crystalline p-type wafer with a 26.1 % efficiency. For its research and development partner ISFH, centrotherm has deposited the polysilicon layer of the POLO solar cell in a LPCVD process.

The centrotherm LPCVD production system, the c.DEPO, was included in PV Magazine's "Technology Highlights 2018", and ranks number five among the 25 most innovative production solutions for the photovoltaic industry.

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